Study on Supercritical Fluid Technique for Application in Nonvolatile Resistive Random Access Memory (RRAM) Device Using SBT Ferroelectric Thin Films
Year: 2024
Type: conference-paper
Authors: Kai-Huang Chen, Ming-Cheng Kao, Chien-Min Cheng, Yao-Chin Wang, Cheng-Che Hsieh, Guo-Jau Hung
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: National Science Council
OpenAlex ID: W4405522369