Work

Investigation of Bragg Reflectors for Polarity-Inverted AlN BAW Resonators Operating at Super High Frequency

Year: 2024

Type: conference-paper

DOI: 10.1109/uffc-js60046.2024.10793731

Authors: Ruidong Qin, Chongyang Huo, Xuanqi Huang, Zhiqiang Mu, Wenjie Yu

Institutions: Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, China Scholarship Council, Shanghai Technology Innovation Project, Research and Development

OpenAlex ID: W4405522408

FWCI: 3.972

Cites: 10

Cited by: 4

Related to: 10