Work

Development and Characterization of PMUTs using Enchanced C-SOI Wafers

Year: 2024

Type: conference-paper

DOI: 10.1109/uffc-js60046.2024.10794038

Authors: Cyril Baby Karuthedath, Abhilash Thanniyil Sebastian, Teuvo Sillanpää, Juha Larismaa, Katja Parkkinen

Institutions: VTT Technical Research Centre of Finland, Okmetic (Finland)

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405522578

FWCI:

Cites: 5

Cited by:

Related to: 10