High-Order Lamb Wave Mode of 128°Y-cut LiNbO 3 /SiO 2 Resonator Covered with AlN Film Exhibiting Higher Electromechanical Coupling
Year: 2024
Type: conference-paper
Authors: Feixuan Huang, Guojie Chang, Mingye Du, Chen Ma, Xi He, Lihang Liao, Jianlin Chen, Qinghua Ren, Fengyuan Yang, Yiming Ma, Nan Wang
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Shanghai University
OpenAlex ID: W4405522603