Work

Tribomechanical Properties of TiSiCN Coatings Obtained by Anodic Evaporation of Titanium and Decomposition of Hexamethyldisilazane in a Discharge in a System with a Self-Heating Hollow Cathode

Year: 2024

Type: article

Source: Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques

DOI: 10.1134/s102745102470112x

Authors: A. I. Menshakov, Yu. A. Bryuhanova

Institutions: Ural Federal University, Russian Academy of Sciences, Institute of Electrophysics

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405524600

FWCI: 0.152

Cites: 20

Cited by: 1

Related to: 10