Work

A Cone-Like TSV Structured ZnO NO2 Gas Sensor that is Produced Using Room-Temperature Laser Drilling and Radio-Frequency Sputtering

Year: 2024

Type: article

Source: Journal of The Electrochemical Society

DOI: 10.1149/1945-7111/ada0f0

Authors: Chih-Kai Wen, Zhi-Sheng Chen, Ting-Jen Hsueh

Language: English

Topic: Gas Sensing Nanomaterials and Sensors

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science and Technology Council

Award: G3504790275

OpenAlex ID: W4405536267

FWCI: 0.104

Cites: 33

Cited by: 1

Related to: 10