Work

Development of Electrical Variable Capacitor Using Fast Recovery Diodes for Semiconductor Manufacturer System

Year: 2024

Type: article

Abstract: This paper proposes a new electrical variable capacitor (EVC) circuit that uses fast recovery diodes. The proposed circuit addresses the shortcomings of conventional EVC circuits, such as the use of PiN diodes and the high voltage stress on semiconductor components, leading to significant cost reductions. The effectiveness of the proposed EVC circuit is verified through experiments conducted at an RF power frequency of 13.56 MHz and an RF power of 1.8 kW.

Source: The Transactions of the Korean Institute of Power Electronics

DOI: 10.6113/tkpe.2024.29.6.503

Authors: Cheong-Hyeon Hwang, Hong-Min Kim, Hee-Won Choi, Yong-Sug Suh, Cheon-Yong Lim

Language: English

Topic: Pulsed Power Technology Applications

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: diamond

OpenAlex ID: W4405559914

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