Work

Data Analyses of Structural Parameters Impacting the Sensing Characteristics of Single-axis Accelerometers

Year: 2024

Type: article

Abstract: differential capacitive bridge accelerometerIn this study, we utilized COMSOL Multiphysics® (version 6.0) finite element software to conduct simulations on accelerometers with varying structural parameters.The data analyses of structural parameters considered included accelerations of 25, 50, and 75 g, and variations in the thicknesses of the mass block, electrodes (both movable and external fixed comb electrodes), and spring elements, ranging from 0.5 to 10 μm.Our analysis focused on evaluating the impacts of these parameter changes on several key metrics: sense voltages, displacements, and maximum von Mises stresses within the accelerometer structure.By systematically altering acceleration levels and the geometrical dimensions of the accelerometer components, we aimed to discern how these variations affect the device performance characteristics.This approach enabled us to gain insights into the structural behavior of the accelerometers under different operational conditions and provided valuable data for optimizing their design and functionality in practical applications.The results obtained from these simulations contribute to advancing the understanding and development of high-performance accelerometer technologies.

Source: Sensors and Materials

DOI: 10.18494/sam5270

Authors: Shang-Te Tsai, Shao-Jun Luo, Rui-Zhi Shi, Cheng-Fu Yang, Kao-Wei Min

Institutions: Sanming University, National University of Kaohsiung, Chaoyang University of Technology, Lunghwa University of Science and Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $748

Funder: National Science and Technology Council