Work

A BP-Smith combined temperature control method for thin film preparation processing

Year: 2024

Type: article

Source: Semiconductor Science and Technology

DOI: 10.1088/1361-6641/ad9946

Authors: Yajie Huang, Donglai Zhang, Bin Zhang, Shimin Pan, Anshou Li, Yi Wang

Institutions: Harbin Institute of Technology, Peng Cheng Laboratory

Language: English

Topic: Advanced Sensor and Control Systems

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, National Key Research and Development Program of China

Awards: G605763516, G8977977255

OpenAlex ID: W4405602666

FWCI: 0.157

Cites: 36

Cited by: 1

Related to: 10