Design simulation and process realization of a flexible MEMS vector hydrophone
Year: 2024
Type: article
Source: Sensor Review
Authors: Jiaxing Wu, Wang Renxin, Xiangkai Zhang, Haoxuan Li, Guochang Liu, Xuejing Dong, Wendong Zhang, Guojun Zhang
Institution: North University of China
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4405619977