Work

Large-area uniform III-V membranes grown on silicon-on-insulator by lateral tunnel epitaxy

Year: 2024
Type: conference-paper
Abstract: Lateral tunnel epitaxy of InP and InAs membranes on silicon-on-insulator (SOI) substrates is demonstrated. The near dislocation-free III-V membranes exhibit smooth growth fronts and are precisely positioned atop silicon (Si) waveguides or the Si device layer.
Language: English
Open Access status: green
OpenAlex ID: W4405633152
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Cites: 6
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Related to: 10