Exceptionally Low Optical Absorption in Aluminum Nitride Thin Films Deposited by Magnetron Sputtering
Year: 2024
Type: conference-paper
Source: IEEE Photonics Conference
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4405633241
