Work

Development of Electrical and Optical Packaging for Silicon Photonic MEMS

Year: 2024
Type: conference-paper
Abstract: We demonstrate a packaging approach to integrate electrical and optical connections in silicon photonic MEMS, utilizing a custom-designed silicon interposer for routing over 118 electrical connections and a 72 channel fiber array to couple to on-chip fiber grating couplers with minimal transmission loss at 1543 nm wavelength.
Language: English
Open Access status: green
OpenAlex ID: W4405633333
FWCI: 0.779
Cites: 5
Cited by: 1
Related to: 10