Work

Crosstalk Evaluation of Piezoresistive Angle Feedback Sensors in MEMS Electromagnetic Micromirrors

Year: 2024

Type: conference-paper

Source: IEEE Photonics Conference

DOI: 10.1109/ipc60965.2024.10799586

Authors: Er-Qi Tu, Xiao-Yong Fang, Ang Li, Jun-Feng Zhou, Wen-Ming Zhang

Institutions: Shanghai Jiao Tong University, State Key Laboratory of Mechanical System and Vibration

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

OpenAlex ID: W4405633701

FWCI:

Cites: 5

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Related to: 10