Work

Tuning the Nonlinear Dynamics of Electrostatically Coupled Micromechanical Resonators to Enhance the Sensitivity of Mode-Localized Sensors

Year: 2024

Type: article

Source: IEEE Sensors Journal

DOI: 10.1109/jsen.2024.3516002

Authors: Ming Lyu, Xiang Zhi, Bo Yang, Jian Zhao, Najib Kacem

Institutions: Inner Mongolia University, Dalian University of Technology, State Key Laboratory of Structural Analysis for Industrial Equipment, Centre National de la Recherche Scientifique, Franche-Comté Électronique Mécanique Thermique et Optique - Sciences et Technologies, Université de Franche-Comté

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Agence Nationale de la Recherche, National Natural Science Foundation of China, National Key Research and Development Program of China

Awards: G2713572605, G4425664382, G5238644913, Ingénierie et Innovation par les sciences physiques, les savoir-faire technologiques et l'interdisciplinarité

OpenAlex ID: W4405717469

FWCI: 0.625

Cites: 29

Cited by: 6

Related to: 10