Work

Oxide Microtubes Fabrication with 10μm to 5μm Pitches and Assembly Characterization

Year: 2024

Type: conference-paper

Source: IEEE CPMT Symposium Japan (ICSJ)

DOI: 10.1109/icsj62869.2024.10804673

Authors: Raphoz Natacha, Peray Patrick, Berger Frédéric, Mailliart Olivier, Desbordes Cloé, Gueugnot Alain

Institutions: Commissariat à l'Énergie Atomique et aux Énergies Alternatives, Laboratoire d'Électronique des Technologies de l'Information

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405754526

FWCI:

Cites: 2

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Related to: 10