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Metal-Core-Specific Screening with Machine Learning: Accelerating the Discovery of Metal Oxide Clusters for Enhanced EUV Lithography Resolution

Year: 2024

Type: article

Source: The Journal of Physical Chemistry Letters

DOI: 10.1021/acs.jpclett.4c03250

Authors: Fang-Ling Yang, Zong-Biao Ye, Yu-Qi Chen, Pan-Pan Zhou, Fu-Jun Gou

Institutions: Sichuan University, State Key Laboratory of Applied Organic Chemistry, Lanzhou University

Language: English

Topic: Machine Learning in Materials Science

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: Sichuan University

Award: G8415463008

OpenAlex ID: W4405765568

FWCI: 0.48

Cites: 28

Cited by: 5

Related to: 10