Work

Peripheral defects related to processing technique in GaN-on-GaN vertical devices

Year: 2024

Type: conference-paper

Abstract: International audience

Source: INRIA a CCSD electronic archive server

Authors: Dagher, M, Brémond, G, Sonneville, Camille, Planson, Dominique, Haas, H, Iretki, M, R, Buckley, J, Maurya, V, Charles, M, Bluet, J, M

Institutions: Institut des Nanotechnologies de Lyon, Institut National des Sciences Appliquées de Lyon, Commissariat à l'Énergie Atomique et aux Énergies Alternatives, CEA Grenoble, Laboratoire d'Électronique des Technologies de l'Information

Language: English

Topic: GaN-based semiconductor devices and materials

Subfield: Condensed Matter Physics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W4405801340

FWCI:

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