Work

Single-Crystal Silicon Thermal-Piezoresistive Resonators as High-Stability Frequency References

Year: 2024

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2024.3515098

Authors: Connor A. Watkins, Jaesung Lee, Jonathan P. McCandless, Harris J. Hall, X.-L. Feng Philip

Institutions: University of Florida, University of Central Florida, United States Air Force Research Laboratory, Case Western Reserve University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405844456

FWCI: 0.937

Cites: 28

Cited by: 9

Related to: 10