Work

Impact of surface roughness on the stability of nanoelectromechanical pressure sensors in the Casimir regime

Year: 2024

Type: article

Abstract: The stability of nanoelectromechanical pressure sensors working in the Casimir regime is considered with account of surface roughness on both the sensor membrane and the ground plate. The equilibrium positions of the sensor membrane are found from the balance between the external measured, elastic, electric pressures, and the Casimir pressure computed by means of the Lifshitz theory. It is shown that the stable equilibrium position of the sensor membrane is nearly independent of the surface roughness, whereas its unstable equilibrium position is shifted to larger membrane-plate separations. The use of these results for creating pressure sensors with further shrunk dimensions is discussed.

Source: International Journal of Modern Physics A

DOI: 10.1142/s0217751x2543002x

Authors: G. L. Klimchitskaya, A. S. Korotkov, V. V. Loboda, V. M. Mostepanenko

Institutions: Russian Academy of Sciences, Peter the Great St. Petersburg Polytechnic University, Pulkovo Observatory

Language: English

Topic: Quantum Electrodynamics and Casimir Effect

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W4405860019

FWCI:

Cites: 22

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Related to: 10