Work

Nanomembrane Etching and Release Process for the Realization of Hybrid InP/Si Photonic‐Crystal Surface‐Emitting Lasers Using Micro‐Transfer Printing

Year: 2024

Type: article

Abstract: Herein, the fabrication of hybrid InP/Si 1.55 μm range photonic‐crystal surface‐emitting lasers (PCSELs) using micro‐transfer printing is reported on. This fabrication technology is expected to have important advantages in manufacturing, performance, and silicon integration, but it relies on a fine‐tuned process for selective etching, release, and subsequent printing of active InP membranes on top of a Si photonic‐crystal layer. Herein, the appropriate wet etching chemistry and processing methodology for preserved layer and interface integrity are discussed and the technology by optically pumped PCSELs is demonstrated, showing continuous‐wave operation at room temperature.

Source: physica status solidi (a)

DOI: 10.1002/pssa.202400693

Authors: Olof Sjödin, Rutvik Urdhwareshe, Ishwor Koirala, Axel Strömberg, Mattias Hammar

Institution: KTH Royal Institute of Technology

Language: English

Topic: Photonic Crystals and Applications

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: hybrid

Estimated APC paid: $3,600

Funders: VINNOVA, Stiftelsen Olle Engkvist Byggmästare, Vetenskapsrådet