Work

Formation of Ohmic Contact in Microelectronic Devices With Porous Surface Substrates

Year: 2024
Type: article
Abstract: In the technology of instrument-making, in particular the technology of the element base of electronics (hybrid integrated circuits, sensors for various purposes, etc.), which uses ensembles of nanoparticles of semiconductor and other materials in a porous matrix, there are often problems with the formation of ohmic contacts to the specified systems. Especially when materials with a porous surface are used as substrates. And, as is known, the quality of contacts mainly determines the reliability of devices, systems and radio-electronic equipment in general. We have proposed and investigated a new effective method of forming an ohmic contact on substrates with a porous surface, in particular, glass.
Language: English
Open Access status: diamond
OpenAlex ID: W4405886145
FWCI: 0.164
Cites: 1
Cited by: 1
Related to: 10