Work

Construction of quartz crystal etching rate database based on Hubbard interpolation method

Year: 2024

Type: conference-paper

Source: International Workshop on Automation, Control, and Communication Engineering (IWACCE)

DOI: 10.1117/12.3052576

Authors: Shuanqiang Song Shuanqiang Song, Chengbao Lv Chengbao Lv, Xinjia Zhao Xinjia Zhao, Zibo Xu Zibo Xu, Qi Chen Qi Chen, Meng Zhao Meng Zhao, Jing Ji Jing Ji

Institution: Xidian University

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405899993

FWCI:

Cites: 9

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Related to: 10