Work

Simulation system for wet etching of quartz beam structures based on the hull method

Year: 2024

Type: conference-paper

Source: International Workshop on Automation, Control, and Communication Engineering (IWACCE)

DOI: 10.1117/12.3052575

Authors: Chengbao Lv, Shuanqiang Song, Xinjia Zhao, Zibo Xu, Qi Chen, Meng Zhao, Jing Ji

Institution: Xidian University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405900027

FWCI:

Cites: 12

Cited by:

Related to: 10