Work

A Weakly Coupled Tuning Fork MEMS Electric Field Sensor With High Resolution and Wide Measurement Range

Year: 2024

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2024.3518622

Authors: Guijie Wang, Shenglin Hou, Lifang Ran, Jianhua Li, Bo Zhang, Xiaolong Wen, Najib Kacem, Ashwin A. Seshia

Institutions: University of Science and Technology Beijing, University of Cambridge, Centre National de la Recherche Scientifique, Franche-Comté Électronique Mécanique Thermique et Optique - Sciences et Technologies, Université de Franche-Comté

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Agence Nationale de la Recherche, National Natural Science Foundation of China, China Scholarship Council

Awards: G2919903900, G5238644913, Ingénierie et Innovation par les sciences physiques, les savoir-faire technologiques et l'interdisciplinarité

OpenAlex ID: W4405906998

FWCI: 1.231

Cites: 45

Cited by: 12

Related to: 10