Work

Five-Terminal Dual-Polarity MEMS Electrostatic Transducer For Near-Limits Kinetic Energy Harvesting From Irregular Vibrations

Year: 2024

Type: conference-paper

Abstract: This paper presents the design, fabrication, and testing of the first silicon electrostatic MEMS device specifically engineered to implement the near-limits kinetic energy harvesting (NL-KEH) principle. A novel five-terminal dual-polarity MEMS transducer is fabricated and experimentally evaluated, demonstrating its potential for improved vibration energy harvesting performance.

DOI: 10.1109/powermems63147.2024.10814232

Authors: Moein Rahmani, Armine Karami, Francisco Ambia, Alexis Brenes, Dimitri Galayko, Elie Lefeuvre, Philippe Basset

Institutions: Centre National de la Recherche Scientifique, Université Gustave Eiffel, Laboratoire d'électronique, systèmes de communication et microsystèmes, Centre de Nanosciences et de Nanotechnologies, Sorbonne Université, LIP6

Language: English

Topic: Innovative Energy Harvesting Technologies

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Affordable and clean energy

Open Access status: green

Funder: Agence Nationale de la Recherche

Award: Near Physical Limit Kinetic Energy Harvesting by Adiabatic Synthesis of the Electromechanical Dynamics

OpenAlex ID: W4405907800

FWCI: 1.293

Cites: 6

Cited by: 1

Related to: 10