Work

Uniformity in cell size of a locally anodized porous anodic alumina film

Year: 2024

Type: conference-paper

Source: IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK)

DOI: 10.1109/imfedk64776.2024.10814484

Authors: Kosei Sato, Yasuo Kimura

Institution: Tokyo University of Technology

Language: English

Topic: Anodic Oxide Films and Nanostructures

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: Japan Society for the Promotion of Science

Award: Separate control of local anodization of micro electrodes on a chip for an integrated micro gas sensor

OpenAlex ID: W4405907850

FWCI:

Cites: 7

Cited by:

Related to: 10