Work

Image Processing Algorithm Assisted Optical Lithography Processing for the Fabrication of Photonic Chips

Year: 2024

Type: conference-paper

Source: IEEE International Conference on Advanced Infocomm Technology

DOI: 10.1109/icait62580.2024.10807978

Authors: Quankeng Huang, Wenchao Jiang, Quandong Huang

Institution: Guangdong University of Technology

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405909408

FWCI:

Cites: 12

Cited by:

Related to: 10