Work

In-Situ Nondestructive and Efficient Identification System for In-Plane Dimension Errors of Wafer-Level Vacuum Encapsulated MEMS Gyro

Year: 2024

Type: conference-paper

Source: International Conference on Integrated Circuits and Microsystems (ICICM)

DOI: 10.1109/icicm63644.2024.10814302

Authors: Jialin Zhu, Meijia Xu, Yang Zhao, Qin Shi, Guoming Xia, Anping Qiu

Institution: Nanjing University of Science and Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405937389

FWCI: 0.78

Cites: 8

Cited by: 1

Related to: 10