Work

Micro-Transfer Printing of Pre-Fabricated III-V Chiplets on Silicon and Silicon Nitride PICs

Year: 2024

Type: conference-paper

Abstract: We present an approach for integrating pre-fabricated III-V chiplets onto Si/Si3N4PICs through micro-transfer printing. It allows completion of III-V and Si/Si3N4processes on their native substrate, while enabling simple integration of multiple III-V functions.

DOI: 10.1109/acp/ipoc63121.2024.10810134

Authors: Biwei Pan, Gunther Roelkens

Institutions: Ghent University, IMEC

Language: English

Topic: Photonic and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

Funder: European Commission

Awards: InP on SiN Photonic Integrated circuits REalized through wafer-scale micro-transfer printing, G434337789, Photonics Solutions at Pilot Scale for Accelerated Medical Device Development

OpenAlex ID: W4405938573