Work

Leakage Study of Ferroelectric AlScN Capacitors Prepared on Different Bottom Electrodes

Year: 2024

Type: conference-paper

Source: International Conference on Integrated Circuits and Microsystems (ICICM)

DOI: 10.1109/icicm63644.2024.10814445

Authors: Jiahao Zhang, Bochang Li, Jiuren Zhou, Yan Liu, Yue Hao, Genquan Han

Institution: Xidian University

Language: English

Topic: Ferroelectric and Negative Capacitance Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405962861

FWCI: 2.418

Cites: 20

Cited by: 3

Related to: 10