Work

Macro-model extraction and system-level simulation of a thermopile-based MEMS vacuum sensor

Year: 2025

Type: article

Source: Journal of Micromechanics and Microengineering

Authors: Yutian Lv, Zaifa Zhou, Jianyu Fu, Yixuan Li

Institutions: Southeast University, Chinese Academy of Sciences, Institute of Microelectronics

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: G3416670892, G4331731716

OpenAlex ID: W4406117385

FWCI: 0.231

Cites: 40

Cited by: 1

Related to: 10