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Towards understanding the mechanisms of material removal and deformation in GaAs during nanomilling

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Year: 2025
Type: article
Source: Journal of Materials Processing Technology
DOI: 10.1016/j.jmatprotec.2025.118712
Authors: Jiqiang Wang, Yongda Yan, Hailong Cui, Shaoqin Liu, Chen Li, Yanquan Geng
Institutions: Harbin Institute of Technology, State Key Laboratory of Robotics and Systems
Language: English

Topic: Advanced Surface Polishing Techniques
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, China Postdoctoral Science Foundation, Heilongjiang Provincial Postdoctoral Science Foundation
Awards: G2927940738, G419950968, G7166488905, G8434423518
OpenAlex ID: W4406141464
FWCI: 15.48
Cites: 44
Cited by: 66
Related to: 10
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