Work

Three-dimensional numerical simulation of the single-wafer spin rinsing process using OpenFOAM

Year: 2025

Type: article

Source: Japanese Journal of Applied Physics

DOI: 10.35848/1347-4065/ada780

Authors: Yoshinori Jinbo, Toshiyuki Sanada

Institution: Shizuoka University

Language: English

Topic: Fluid Dynamics and Heat Transfer

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4406169301

FWCI: 0.459

Cites: 25

Cited by: 1

Related to: 10