Work

On-machine separation and compensation of target mirror’s surface shape errors in multidimensional interferometric measurement system

Year: 2025

Type: article

Source: Review of Scientific Instruments

DOI: 10.1063/5.0232489

Authors: Zuyang Zhang, Qiangxian Huang, Jun Lu, Hongli Li, Rongjun Cheng, Liansheng Zhang

Institution: Hefei University of Technology

Language: English

Topic: Advanced Measurement and Metrology Techniques

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Natural Science Foundation of Anhui Province, National Key Research and Development Program of China, Fundamental Research Funds for the Central Universities

Awards: G1167915187, G2167714867, G3933401175, G4759826327, G8434824076

OpenAlex ID: W4406174745

FWCI: 1.205

Cites: 24

Cited by: 4

Related to: 10