Work

Optimization of the single crystal silicon nano-positioning stage in X-ray interferometer

Year: 2025

Type: conference-paper

Source: IET conference proceedings.

DOI: 10.1049/icp.2024.2751

Authors: Maoyuan Chang, Wei Li, Jinjie Wu

Institutions: Chengdu University of Technology, National Institute of Metrology

Language: English

Topic: Advanced Measurement and Metrology Techniques

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4406181907

FWCI:

Cites:

Cited by:

Related to: 10