Work

Study on the sensitivity mechanism of low-coupled heat flow biaxial MEMS accelerometers

Year: 2025

Type: conference-paper

Source: IET conference proceedings.

DOI: 10.1049/icp.2024.2733

Authors: Junyu Liu, Linhua Piao

Institution: Ministry of Education of the People's Republic of China

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4406181942

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