Unraveling the influence of substrate surface and temperature on microstructural evolution of crystalline MoS 2 in atomic layer deposition
Year: 2025
Type: article
Source: Journal of Materials Chemistry C
DOI: 10.1039/d4tc04752d
Authors: Seung Ho Ryu, Seong Keun Kim
Institutions: Korea University, Korea Institute of Science and Technology
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
Awards: G710323539, G8323672294, G8794549428
OpenAlex ID: W4406184589