Work

Discrete Event Control for the Automation of Reactive Sputter Plants

Year: 2024

Type: conference-paper

Source: International Conference on Control, Automation, Robotics and Vision (ICARCV)

DOI: 10.1109/icarcv63323.2024.10821598

Authors: Fabian Schneider, Alexander Fay, Christian Woelfel

Institution: Ruhr University Bochum

Language: English

Topic: Petri Nets in System Modeling

Subfield: Computational Theory and Mathematics

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4406208848

FWCI:

Cites: 17

Cited by:

Related to: 10