Work

Numerical simulation and optimization of discharge chamber miniaturization for the double hollow cathode sputtering type metal ion source

Year: 2025

Type: article

Source: Journal of Instrumentation

DOI: 10.1088/1748-0221/20/01/p01001

Authors: Tingru Zhu, Jinghui Wang, Dongpo Fu, Weijiang Zhao, Shixian Cai, Caijie Zhang, Kun Zhu

Institutions: Peking University, State Key Laboratory of Nuclear Physics and Technology

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4406217243

FWCI:

Cites: 32

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Related to: 10