Condition-Based Monitoring for Failure Detection and Cause Identification in Wafer Transfer Robot Using Machine Learning and Explainable Artificial Intelligence Algorithms
Year: 2024
Type: conference-paper
Authors: Jeong Eun Jeon, Sang Jeen Hong, Seung-Soo Han
Institution: Myongji University
Language: English
Subfield: Control and Systems Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G5854330930
OpenAlex ID: W4406264510