An Efficient Linear Programming Model for Dual-arm Cluster Tools with Chamber Cleaning Operation
Year: 2024
Type: conference-paper
Authors: GuanZhong Wu, ChunRong Pan, WenQing Xiong, Lifa He
Institution: Jiangxi University of Science and Technology
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G6968478175
OpenAlex ID: W4406266972
