Work

Frequency Dependence of Ion Energy at the Outlet of a Capacitive RF Discharge Placed in an External Magnetic Field with a Predominant Radial Component

Year: 2024

Type: article

Source: Plasma Physics Reports

DOI: 10.1134/s1063780x24601883

Authors: G. V. Shvydkiy, K. V. Vavilin, I. I. Zadiriev, E. A. Kralkina, A. M. Nikonov

Institution: Lomonosov Moscow State University

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4406290644

FWCI: 0.103

Cites: 7

Cited by: 1

Related to: 10