Work

Application of localized ALD technique for maskless fabrication of nanometric hydrophobic patterns for droplet guidance

Year: 2024

Type: conference-paper

Source: HAL (Le Centre pour la Communication Scientifique Directe)

Authors: Souvignet, Thomas, Carlotti, Jade, Salles, Vincent, Maillard, Mathieu, Marichy, Catherine

Institution: Laboratoire des Multimatériaux et Interfaces

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4406340883

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