Work

Design of a -120℃ Mixed Refrigerant Refrigerator System for Cryogenic Semiconductor Etching Process

Year: 2024

Type: article

Source: Journal of Power System Engineering

DOI: 10.9726/kspse.2024.28.6.063

Authors: Hyung-Yong Ji, Cheonkyu Lee

Language: English

Topic: Refrigeration and Air Conditioning Technologies

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Ministry of Trade, Industry and Energy

OpenAlex ID: W4406380617

FWCI:

Cites: 16

Cited by:

Related to: 10