Nondestructive Detection of Micropipes and Inclusions in 4H-Sic Substrate by Laser-Based Optical Surface Inspection System
Year: 2024
Type: conference-paper
Authors: Chen Shao, Huiqing Chen, Desheng Wang, Dapeng Chang, Xuejian Xie, Guanglei Zhong, Jiaxin Zhang, Xiufang Chen, Xianglong Yang, Xiangang Xu
Institution: Shandong University
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4406459768