Work

Modulation of Interface Fixed Charge on AlON/SiO2/SiC with In-Situ Nitrogen Doping

Year: 2024

Type: conference-paper

DOI: 10.1109/sslchinaifws64644.2024.10835315

Authors: Cheng Zhang, Xinhong Cheng, Yufei Tian, Junhong Fen, Zhongyu Liu, Hang Su, Li Zhen

Institutions: Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology

Language: English

Topic: Silicon Carbide Semiconductor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4406459830

FWCI:

Cites: 11

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Related to: 10