Work

Chemical Polishing Rate Differences Induced by Atomic Arrangement on Polar Surfaces of AIN Crystals

Year: 2024

Type: conference-paper

DOI: 10.1109/sslchinaifws64644.2024.10835381

Authors: Zhao Liu, Wenliang Li, Honglei Wu

Institution: Shenzhen University

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, National Key Research and Development Program of China

Awards: G1202485131, G1735720951

OpenAlex ID: W4406460095

FWCI: 0.981

Cites: 3

Cited by: 1

Related to: 10