The Impact of In-Situ SiNx Passivation Layers Grown with Different Carrier Gases on the Structural and Electrical Performance of GaN-MISHEMTs
Year: 2024
Type: conference-paper
Authors: Si Liu, Haochen Zhang, Haiding Sun
Institution: University of Science and Technology of China
Language: English
Subfield: Condensed Matter Physics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4406460315