Work

Measurement of Doping Concentration in P-type Silicon Carbide Epitaxial Wafers by Glow Discharge Mass Spectrometry

Year: 2024

Type: conference-paper

DOI: 10.1109/sslchinaifws64644.2024.10835383

Authors: Zhenkai Sun, Yue Zhang, Hongyu Shao, Xianglong Yang, Xintong Liu, Xuejian Xie, Xiufang Chen, Xiangang Xu

Institutions: Shandong University, State Key Laboratory of Crystal Materials

Language: English

Topic: Silicon Carbide Semiconductor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4406460324

FWCI:

Cites: 3

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Related to: 10